JPH0342640Y2 - - Google Patents

Info

Publication number
JPH0342640Y2
JPH0342640Y2 JP5563287U JP5563287U JPH0342640Y2 JP H0342640 Y2 JPH0342640 Y2 JP H0342640Y2 JP 5563287 U JP5563287 U JP 5563287U JP 5563287 U JP5563287 U JP 5563287U JP H0342640 Y2 JPH0342640 Y2 JP H0342640Y2
Authority
JP
Japan
Prior art keywords
heater
heating chamber
power supply
support insulator
supply port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5563287U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63162496U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5563287U priority Critical patent/JPH0342640Y2/ja
Publication of JPS63162496U publication Critical patent/JPS63162496U/ja
Application granted granted Critical
Publication of JPH0342640Y2 publication Critical patent/JPH0342640Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Control Of High-Frequency Heating Circuits (AREA)
JP5563287U 1987-04-13 1987-04-13 Expired JPH0342640Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5563287U JPH0342640Y2 (en]) 1987-04-13 1987-04-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5563287U JPH0342640Y2 (en]) 1987-04-13 1987-04-13

Publications (2)

Publication Number Publication Date
JPS63162496U JPS63162496U (en]) 1988-10-24
JPH0342640Y2 true JPH0342640Y2 (en]) 1991-09-06

Family

ID=30883707

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5563287U Expired JPH0342640Y2 (en]) 1987-04-13 1987-04-13

Country Status (1)

Country Link
JP (1) JPH0342640Y2 (en])

Also Published As

Publication number Publication date
JPS63162496U (en]) 1988-10-24

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